Fabrication of doped nano‐electromechanical systems

DV Scheible, H Qin, HS Kim… - physica status solidi (RRL) …, 2007 - Wiley Online Library
We present a new generation of nano‐electromechanical systems (NEMS), which are
realized by doping the semiconductor base material. In contrast to the traditional approach …

Fabrication of doped nano-electromechanical systems

DV Scheible, H Qin, HS Kim… - Physica Status Solidi …, 2007 - ui.adsabs.harvard.edu
We present a new generation of nano-electromechanical systems (NEMS), which are
realized by doping the semiconductor base material. In contrast to the traditional approach …

[引用][C] Fabrication of doped nano-electromechanical systems

DV SCHEIBLE, HUA QIN, HS KIM… - Physica status solidi …, 2007 - pascal-francis.inist.fr
Fabrication of doped nano-electromechanical systems CNRS Inist Pascal-Francis CNRS
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[PDF][PDF] Fabrication of doped nano-electromechanical systems

DV Scheible, H Qin, HS Kim, RH Blick - 2007 - Citeseer
The push to realize mechanical devices on the nanoscale has led to the introduction of nano-
electromechanical systems (NEMS)[1–4]. Being the next generation emerging after their …

[PDF][PDF] Fabrication of doped nano-electromechanical systems

DV Scheible, H Qin, HS Kim, RH Blick - 2007 - nano.physik.lmu.de
The push to realize mechanical devices on the nanoscale has led to the introduction of nano-
electromechanical systems (NEMS)[1–4]. Being the next generation emerging after their …

[PDF][PDF] Fabrication of doped nano-electromechanical systems

DV Scheible, H Qin, HS Kim, RH Blick - 2007 - nano.physik.uni-muenchen.de
The push to realize mechanical devices on the nanoscale has led to the introduction of nano-
electromechanical systems (NEMS)[1–4]. Being the next generation emerging after their …

[PDF][PDF] Fabrication of doped nano-electromechanical systems

DV Scheible, H Qin, HS Kim, RH Blick - 2007 - nano.physik.uni-muenchen.de
The push to realize mechanical devices on the nanoscale has led to the introduction of nano-
electromechanical systems (NEMS)[1–4]. Being the next generation emerging after their …

[引用][C] Fabrication of doped nano-electromechanical systems

DV SCHEIBLE, HUA QIN, HS KIM… - Physica status solidi. Rapid …, 2007 - Wiley-VCH