Orientation–free and differentially pumped addition of a low-flux reactive gas beam to a surface analysis system

C Harthcock, A Jahanbekam, JR Eskelsen… - Review of Scientific …, 2016 - pubs.aip.org
We describe an example of a piecewise gas chamber that can be customized to incorporate
a low flux of gas-phase radicals with an existing surface analysis chamber for in situ and …

Orientation-free and differentially pumped addition of a low-flux reactive gas beam to a surface analysis system

C Harthcock, A Jahanbekam… - Review of scientific …, 2016 - rex.libraries.wsu.edu
We describe an example of a piecewise gas chamber that can be customized to incorporate
a low flux of gas-phase radicals with an existing surface analysis chamber for in situ and …

Orientation-free and differentially pumped addition of a low-flux reactive gas beam to a surface analysis system

C Harthcock, A Jahanbekam… - Review of Scientific …, 2016 - ui.adsabs.harvard.edu
We describe an example of a piecewise gas chamber that can be customized to incorporate
a low flux of gas-phase radicals with an existing surface analysis chamber for in situ and …

Orientation–free and differentially pumped addition of a low-flux reactive gas beam to a surface analysis system

C Harthcock, A Jahanbekam, JR Eskelsen… - Review of Scientific …, 2016 - pubs.aip.org
We describe an example of a piecewise gas chamber that can be customized to incorporate
a low flux of gas-phase radicals with an existing surface analysis chamber for in situ and …

Orientation-free and differentially pumped addition of a low-flux reactive gas beam to a surface analysis system

C Harthcock, A Jahanbekam… - The Review of …, 2016 - pubmed.ncbi.nlm.nih.gov
We describe an example of a piecewise gas chamber that can be customized to incorporate
a low flux of gas-phase radicals with an existing surface analysis chamber for in situ and …

Orientation-free and differentially pumped addition of a low-flux reactive gas beam to a surface analysis system.

C Harthcock, A Jahanbekam, JR Eskelsen… - The Review of Scientific …, 2016 - europepmc.org
We describe an example of a piecewise gas chamber that can be customized to incorporate
a low flux of gas-phase radicals with an existing surface analysis chamber for in situ and …