Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback

R Schroedter, M Schwarzenberg… - MOEMS and …, 2017 - spiedigitallibrary.org
In this paper we present a 2D raster scanning quasi-static/resonant micro mirror being
controlled in both axes in closed-loop with on-chip piezo-resistive sensor feedback. While …
被引用次数：16 相关文章

[引用][C] Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback

R Schroedter, M Schwarzenberg… - Proc. SPIE 10116 …, 2017 - repositum.tuwien.at
reposiTUm: Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner
with on-chip piezo-resistive sensor feedback reposiTUm ABOUT REPOSITUM HELP Login …

Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback

R Schroedter, M Schwarzenberg, A Dreyhaupt, R Barth… - 2017 - publica.fraunhofer.de
In this paper we present a 2D raster scanning quasi-static/resonant micro mirror being
controlled in both axes in closed-loop with on-chip piezo-resistive sensor feedback. While …

Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback

R Schroedter, M Schwarzenberg, A Dreyhaupt… - Proc. of SPIE … - spiedigitallibrary.org
In this paper we present a 2D raster scanning quasi-static/resonant micro mirror being
controlled in both axes in closed-loop with on-chip piezo-resistive sensor feedback. While …

Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback

R Schroedter, M Schwarzenberg… - Society of Photo …, 2017 - ui.adsabs.harvard.edu
In this paper we present a 2D raster scanning quasi-static/resonant micro mirror being
controlled in both axes in closed-loop with on-chip piezo-resistive sensor feedback. While …