Effects of substrate temperature on electrical and structural properties of copper thin films

KY Chan, TY Tou, BS Teo - Microelectronics journal, 2006 - Elsevier
This paper addresses the effects of substrate temperature on electrical and structural
properties of dc magnetron sputter-deposited copper (Cu) thin films on p-type silicon …
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Effects of substrate temperature on electrical and structural properties of copper thin films

KY Chan, TY Tou, BS Teo - Microelectronics Journal, 2006 - infona.pl
This paper addresses the effects of substrate temperature on electrical and structural
properties of dc magnetron sputter-deposited copper (Cu) thin films on p-type silicon …

[引用][C] Effects of substrate temperature on electrical and structural properties of copper thin films

KY Chan, TY Tou, BS Teo - Microelectronics Journal, 2006 - cir.nii.ac.jp
Effects of substrate temperature on electrical and structural properties of copper thin films | CiNii
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[引用][C] Effects of substrate temperature on electrical and structural properties of copper thin films

KY CHAN, TY TOU, BS TEO - Microelectronics journal, 2006 - pascal-francis.inist.fr
Effects of substrate temperature on electrical and structural properties of copper thin films
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[引用][C] Effects of substrate temperature on electrical and structural properties of copper thin films

KY CHAN, TY TOU, BS TEO - Microelectronics journal, 2006 - Elsevier