Similarity properties in capacitive radio frequency plasmas with nonlinear collision processes

D Yang, Y Fu, B Zheng, H Wang, QH Fan… - Plasma Sources …, 2021 - iopscience.iop.org
Similarity laws (SL) are essential for correlating the characteristics of plasmas at different
dimensional scales, which have been validated for radio frequency (rf) discharges at low …
被引用次数：12 相关文章

Similarity properties in capacitive radio frequency plasmas with nonlinear collision processes

D Yang, Y Fu, B Zheng, H Wang, QH Fan, X Zou… - 2021 - publica.fraunhofer.de
Similarity laws (SL) are essential for correlating the characteristics of plasmas at different
dimensional scales, which have been validated for radio frequency (rf) discharges at low …

Similarity properties in capacitive radio frequency plasmas with nonlinear collision processes

D Yang, Y Fu, B Zheng, H Wang… - Plasma Sources …, 2021 - ui.adsabs.harvard.edu
Similarity laws (SL) are essential for correlating the characteristics of plasmas at different
dimensional scales, which have been validated for radio frequency (rf) discharges at low …

Similarity properties in capacitive radio frequency plasmas with nonlinear collision processes

D Yang, Y Fu, B Zheng, H Wang, QH Fan, X Zou… - … Sources Science and …, 2021 - osti.gov
Similarity laws (SL) are essential for correlating the characteristics of plasmas at different
dimensional scales, which have been validated for radio frequency (rf) discharges at low …
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[PDF][PDF] Similarity properties in capacitive radio frequency plasmas with nonlinear collision processes

D Yang, Y Fu, B Zheng, H Wang, QH Fan… - … Sources Science and …, 2021 - drive.google.com
Similarity laws (SL) are essential for correlating the characteristics of plasmas at different
dimensional scales, which have been validated for radio frequency (rf) discharges at low …