Modeling rf mems devices

K Van Caekenberghe - IEEE Microwave Magazine, 2012 - ieeexplore.ieee.org
The term radio frequency (RF) microelectromechanical systems (MEMS) refers to electronic
devices with a moving submillimeter-sized part (beam, comb, disc, or ring), which provide …
被引用次数：39 相关文章

Modeling RF MEMS Devices

K Caekenberghe - IEEE Microwave Magazine, 2012 - infona.pl
The term radiofrequency (RF) microelectromechanical systems (MEMS) refers to electronic
devices with a moving submillimeter-sized part (beam, comb, disc, or ring), which provide …