Magnetic tunnel junction with reduced damage
CH Diaz, RL Lee - US Patent 9,905,751, 2018 - Google Patents
A method includes patterning a metal layer to form a plurality of bottom electrode features,
forming a Magnetic Tunnel Junction (MTJ) stack by a line-of-sight deposition process such …
forming a Magnetic Tunnel Junction (MTJ) stack by a line-of-sight deposition process such …
Magnetic Tunnel Junction With Reduced Damage
CH Diaz - US Patent App. 14/757,582, 2017 - Google Patents
A method includes patterning a metal layer to form a plurality of bottom electrode features,
forming a Magnetic Tunnel Junction (MTJ) stack by a line-of-sight deposition process such …
forming a Magnetic Tunnel Junction (MTJ) stack by a line-of-sight deposition process such …
Magnetic tunnel junction with reduced damage
CH Diaz, R Lee - US Patent 9,905,751, 2018 - freepatentsonline.com
A method includes patterning a metal layer to form a plurality of bottom electrode features,
forming a Magnetic Tunnel Junction (MTJ) stack by a line-of-sight deposition process such …
forming a Magnetic Tunnel Junction (MTJ) stack by a line-of-sight deposition process such …
Magnetic Tunnel Junction With Reduced Damage
CH Diaz - US Patent App. 14/757,582, 2017 - freepatentsonline.com
A method includes patterning a metal layer to form a plurality of bottom electrode features,
forming a Magnetic Tunnel Junction (MTJ) stack by a line-of-sight deposition process such …
forming a Magnetic Tunnel Junction (MTJ) stack by a line-of-sight deposition process such …