A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift

Y Zhu, W Liu, K Jia, W Liao, H Xie - Sensors and Actuators A: Physical, 2011 - Elsevier
This paper presents the design, fabrication and characterization of a piezoelectrically
actuated high-fill-factor tip-tilt-piston (TTP) micromirror with small tilt and lateral shift during …
被引用次数：88 相关文章

A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift

Y Zhu, W Liu, K Jia, W Liao, H Xie - Sensors & Actuators: A. Physical, 2011 - infona.pl
This paper presents the design, fabrication and characterization of a piezoelectrically
actuated high-fill-factor tip-tilt-piston (TTP) micromirror with small tilt and lateral shift during …

A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift

Y Zhu, W Liu, K Jia, W Liao… - Sensors and Actuators A …, 2011 - ui.adsabs.harvard.edu
This paper presents the design, fabrication and characterization of a piezoelectrically
actuated high-fill-factor tip-tilt-piston (TTP) micromirror with small tilt and lateral shift during …

A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift

Y Zhu, W Liu, K Jia, W Liao, H Xie - Sensors & Actuators: A. Physical, 2011 - infona.pl
This paper presents the design, fabrication and characterization of a piezoelectrically
actuated high-fill-factor tip-tilt-piston (TTP) micromirror with small tilt and lateral shift during …