[HTML][HTML] MEMS and MOEMS gyroscopes: A review

W Huang, X Yan, S Zhang, Z Li, JNA Hassan, D Chen… - Photonic Sensors, 2023 - Springer
Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …

MEMS and MOEMS Gyroscopes: A Review.

W Huang, X Yan, S Zhang, Z Li… - Photonic …, 2023 - search.ebscohost.com
Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …

MEMS and MOEMS Gyroscopes: A Review

W Huang, X Yan, S Zhang, Z Li… - Photonic …, 2023 - ui.adsabs.harvard.edu
Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …

MEMS and MOEMS Gyroscopes: A Review

W Huang, X Yan, S Zhang, Z Li, JNA Hassan… - Photonic …, 2023 - search.proquest.com
Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …