10–25 NM piezoelectric nano-actuators and NEMS switches for millivolt computational logic

U Zaghloul, G Piazza - 2013 IEEE 26th International …, 2013 - ieeexplore.ieee.org
This paper reports, for the first time, on the design, fabrication, and measurement of
piezoelectric nano-actuators and novel stress-compensating NEMS switches based on 10 …
被引用次数：34 相关文章

10–25 NM piezoelectric nano-actuators and NEMS switches for millivolt computational logic

U Zaghloul, G Piazza - 2013 IEEE 26th International Conference on Micro … - infona.pl
This paper reports, for the first time, on the design, fabrication, and measurement of
piezoelectric nano-actuators and novel stress-compensating NEMS switches based on 10 …