K Fumio, U Hiroyuki, S Takahiro, I Kenichi - Japanese Journal of Applied …, 1987 - cir.nii.ac.jp
抄録 A GaAlAs/GaAs Metalorganic chemical vapor deposition (MOCVD) has been
introduced for growing GaAlAs/GaAs wafers with a thick active layer (d≅ 3 μm) and …