Electrical characterization of semiconductor materials and devices using scanning probe microscopy

E Brazel, A Erickson - Materials Science in Semiconductor Processing, 2001 - Elsevier
Several scanning probe microscopy (SPM) modes exist for the electrical characterization of
semiconductor materials and devices with nm-scale resolution. The most important electrical …

Electrical characterization of semiconductor materials and devices using scanning probe microscopy

P De Wolf, E Brazel, A Erickson - Materials Science in Semiconductor …, 2001 - elibrary.ru
Several scanning probe microscopy (SPM) modes exist for the electrical characterization of
semiconductor materials and devices with nm-scale resolution. The most important electrical …

Electrical characterization of semiconductor materials and devices using scanning probe microscopy

P De Wolf, E Brazel, A Erickson - Materials Science in Semiconductor …, 2001 - infona.pl
Several scanning probe microscopy (SPM) modes exist for the electrical characterization of
semiconductor materials and devices with nm-scale resolution. The most important electrical …