A low actuation voltage electrostatic actuator for RF MEMS switch applications
CH Chu, WP Shih, SY Chung, HC Tsai… - Journal of …, 2007 - iopscience.iop.org
This paper presents the design, fabrication and characterization of an RF MEMS switch. Low
actuation voltage and high isolation of the switch were achieved by exploiting buckling and …
actuation voltage and high isolation of the switch were achieved by exploiting buckling and …
[PDF][PDF] A low actuation voltage electrostatic actuator for RF MEMS switch applications
CH Chu, WP Shih, SY Chung, HC Tsai… - J. Micromech …, 2007 - researchgate.net
This paper presents the design, fabrication and characterization of an RF MEMS switch. Low
actuation voltage and high isolation of the switch were achieved by exploiting buckling and …
actuation voltage and high isolation of the switch were achieved by exploiting buckling and …
[引用][C] A low actuation voltage electrostatic actuator for RF MEMS switch applications
CH CHU, WP SHIH, SY CHUNG… - Journal of …, 2007 - pascal-francis.inist.fr
A low actuation voltage electrostatic actuator for RF MEMS switch applications CNRS Inist
Pascal-Francis CNRS Pascal and Francis Bibliographic Databases Simple search Advanced …
Pascal-Francis CNRS Pascal and Francis Bibliographic Databases Simple search Advanced …
A low actuation voltage electrostatic actuator for RF MEMS switch applications
CH Chu, WP Shih, SY Chung, HC Tsai… - Journal of …, 2007 - ui.adsabs.harvard.edu
This paper presents the design, fabrication and characterization of an RF MEMS switch. Low
actuation voltage and high isolation of the switch were achieved by exploiting buckling and …
actuation voltage and high isolation of the switch were achieved by exploiting buckling and …
[PDF][PDF] A low actuation voltage electrostatic actuator for RF MEMS switch applications
CH Chu, WP Shih, SY Chung, HC Tsai, TK Shing… - J. Micromech …, 2007 - Citeseer
This paper presents the design, fabrication and characterization of an RF MEMS switch. Low
actuation voltage and high isolation of the switch were achieved by exploiting buckling and …
actuation voltage and high isolation of the switch were achieved by exploiting buckling and …
A low actuation voltage electrostatic actuator for RF MEMS switch applications
CH Chu, WP Shih, SY Chung, HC Tsai, TK Shing… - 2007 - arch.neicon.ru
This paper presents the design, fabrication and characterization of an RF MEMS switch. Low
actuation voltage and high isolation of the switch were achieved by exploiting buckling and …
actuation voltage and high isolation of the switch were achieved by exploiting buckling and …