Broadband interference lithography at extreme ultraviolet and soft x-ray wavelengths

N Mojarad, D Fan, J Gobrecht, Y Ekinci - Optics Letters, 2014 - opg.optica.org
Manufacturing efficient and broadband optics is of high technological importance for various
applications in all wavelength regimes. Particularly in the extreme ultraviolet and soft x-ray …
被引用次数：49 相关文章

[引用][C] Broadband interference lithography at extreme ultraviolet and soft x-ray wavelengths

N Mojarad, D Fan, J Gobrecht, Y Ekinci - Optics Letters, 2014 - ui.adsabs.harvard.edu
Broadband interference lithography at extreme ultraviolet and soft x-ray wavelengths - NASA/ADS
Now on home page ads icon ads Enable full ADS view NASA/ADS Broadband interference …

Broadband interference lithography at extreme ultraviolet and soft x-ray wavelengths

N Mojarad, D Fan, J Gobrecht, Y Ekinci - Optics letters, 2014 - pubmed.ncbi.nlm.nih.gov
Manufacturing efficient and broadband optics is of high technological importance for various
applications in all wavelength regimes. Particularly in the extreme ultraviolet and soft x-ray …

Broadband interference lithography at extreme ultraviolet and soft x-ray wavelengths.

N Mojarad, D Fan, J Gobrecht, Y Ekinci - Optics Letters, 2014 - europepmc.org
Manufacturing efficient and broadband optics is of high technological importance for various
applications in all wavelength regimes. Particularly in the extreme ultraviolet and soft x-ray …

[引用][C] Broadband interference lithography at extreme ultraviolet and soft x-ray wavelengths

N Mojarad, D Fan, J Gobrecht, Y Ekinci - Optics Letters, 2014 - cir.nii.ac.jp
Broadband interference lithography at extreme ultraviolet and soft x-ray wavelengths | CiNii
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