Fabrication and characterization of zinc oxide piezoelectric MEMS resonator
PP Deshpande, RS Pande, RM Patrikar - Microsystem Technologies, 2020 - Springer
Micro electromechanical system resonators (MEMS) are being explored to fulfil the demands
of speedy wireless communication circuits, which may be utilized as oscillators and/or filters …
of speedy wireless communication circuits, which may be utilized as oscillators and/or filters …
Fabrication and characterization of zinc oxide piezoelectric MEMS resonator
PP Deshpande, RS Pande, RM Patrikar - Microsystem Technologies, 2020 - dl.acm.org
Micro electromechanical system resonators (MEMS) are being explored to fulfil the demands
of speedy wireless communication circuits, which may be utilized as oscillators and/or filters …
of speedy wireless communication circuits, which may be utilized as oscillators and/or filters …