Method of forming optical coupler
IG Kim, SH Kim, G Kim - US Patent App. 13/289,743, 2012 - Google Patents
SUMMARY 0005 Embodiments of the inventive concepts provide methods of forming an
optical coupler having improved opti cal coupling efficiency. 0006. According to example …
optical coupler having improved opti cal coupling efficiency. 0006. According to example …
METHOD OF FORMING OPTICAL COUPLER
IG Kim, SH Kim, G Kim - US Patent App. 13/289,743, 2012 - freepatentsonline.com
Provided are methods of forming an optical coupler. The method includes forming a first
waveguide and an in-plane tapered layer on a silicon layer, forming a mask with first and …
waveguide and an in-plane tapered layer on a silicon layer, forming a mask with first and …