Atomic layer deposition of quaternary oxide (La, Sr) CoO 3− δ thin films

Dalton Transactions, 2015 - pubs.rsc.org
A novel atomic layer deposition (ALD) process was developed for fabricating quaternary
cobalt oxide (La1− xSrx) CoO3− δ thin films having the eye on future applications of such …
被引用次数：40 相关文章

Atomic layer deposition of quaternary oxide (La, Sr) CoO3-δ thin films

E Ahvenniemi, M Matvejeff… - Dalton transactions …, 2015 - pubmed.ncbi.nlm.nih.gov
A novel atomic layer deposition (ALD) process was developed for fabricating quaternary
cobalt oxide (La1-xSrx) CoO3-δ thin films having the eye on future applications of such films …

Atomic layer deposition of quaternary oxide (La, Sr) CoO3-δ thin films

E Ahvenniemi, M Matvejeff, M Karppinen - Dalton Transactions, 2015 - research.aalto.fi
A novel atomic layer deposition (ALD) process was developed for fabricating quaternary
cobalt oxide (La 1-x Sr x) CoO 3-δ thin films having the eye on future applications of such …

Atomic layer deposition of quaternary oxide (La, Sr) CoO3-δ thin films.

E Ahvenniemi, M Matvejeff… - Dalton Transactions …, 2015 - europepmc.org
A novel atomic layer deposition (ALD) process was developed for fabricating quaternary
cobalt oxide (La1-xSrx) CoO3-δ thin films having the eye on future applications of such films …