[PDF] cmu.edu

[PDF][PDF] Damping in CMOS-MEMS resonators

J Brotz - 2004 - research.ece.cmu.edu
This research examines the energy loss in micromechanical resonators fabricated in a
CMOS-MEMS process. Characterization and understanding of energy loss is a first step to …
被引用次数：32 相关文章

[引用][C] Damping in CMOS-MEMS resonators

J BROTZ - MS Thesis Report (Carnegie Mellon), 2004 - cir.nii.ac.jp
Damping in CMOS-MEMS resonators | CiNii Research CiNii 国立情報学研究所 学術情報
ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 論文・データをさがす 大学図書館の本を …
[PDF] psu.edu

[PDF][PDF] Damping in CMOS-MEMS Resonators

J Brotz - 2004 - Citeseer
This research examines the energy loss in micromechanical resonators fabricated in a
CMOS-MEMS process. Characterization and understanding of energy loss is a first step to …