MEMS tunable Fabry-Perot filters with thick, two sided optical coatings

PA Stupar, RL Borwick, JF DeNatale… - … Solid-State Sensors …, 2009 - ieeexplore.ieee.org
A MEMS based tunable Fabry-Perot filter array has been designed and fabricated to provide
spectral information in the long-wave infrared (LWIR) band, while remaining transparent in …
被引用次数：39 相关文章

MEMS tunable Fabry-Perot Filters with thick, two sided optical coatings

PA Stupar, RL Borwick, JF DeNatale, PH Kobrin… - … 2009-2009 International … - infona.pl
A MEMS based tunable Fabry-Perot filter array has been designed and fabricated to provide
spectral information in the long-wave infrared (LWIR) band, while remaining transparent in …
[PDF] purdue.edu

[PDF][PDF] MEMS TUNABLE FABRY-PEROT FILTERS WITH THICK, TWO SIDED OPTICAL COATINGS

PA Stupar, RL Borwick III, JF DeNatale, PH Kobrin… - engineering.purdue.edu
ABSTRACT A MEMS based tunable Fabry-Perot Filter array has been designed and
fabricated to provide spectral information in the Long-Wave Infra-Red (LWIR) band, while …