Depth profile investigation of the incorporated iron atoms during Kr+ ion beam sputtering on Si (001)

B Khanbabaee, B Arezki, A Biermanns, M Cornejo… - Thin solid films, 2013 - Elsevier
We investigate the incorporation of iron atoms during nano-patterning of Si surfaces induced
by 2keV Kr+ ion beam erosion under an off-normal incidence angle of 15°. Considering the …
被引用次数：17 相关文章

[引用][C] Depth profile investigation of the incorporated iron atoms during Kr+ ion beam sputtering on Si (001)

B Khanbabaee, B Arezki, A Biermanns… - Thin Solid …, 2013 - ui.adsabs.harvard.edu
Depth profile investigation of the incorporated iron atoms during Kr+ ion beam sputtering on
Si (001) - NASA/ADS Now on home page ads icon ads Enable full ADS view NASA/ADS …

[引用][C] Depth profile investigation of the incorporated iron atoms during Kr+ ion beam sputtering on Si (001)

B KHANBABAEE, B AREZKI, A BIERMANNS… - Thin solid …, 2013 - pascal-francis.inist.fr
Depth profile investigation of the incorporated iron atoms during Kr+ ion beam sputtering on
Si (001) CNRS Inist Pascal-Francis CNRS Pascal and Francis Bibliographic Databases …

Depth profile investigation of the incorporated iron atoms during Kr {sup+} ion beam sputtering on Si (001)

B Khanbabaee, B Arezki, A Biermanns, M Cornejo… - Thin Solid Films, 2013 - osti.gov
We investigate the incorporation of iron atoms during nano-patterning of Si surfaces induced
by 2 keV Kr {sup+} ion beam erosion under an off-normal incidence angle of 15° …

Depth profile investigation of the incorporated iron atoms during Kr+ ion beam sputtering on Si (001)

B Khanbabaee, B Arezki, A Biermanns, M Cornejo… - Thin Solid Films, 2013 - infona.pl
We investigate the incorporation of iron atoms during nano-patterning of Si surfaces induced
by 2keV Kr+ ion beam erosion under an off-normal incidence angle of 15°. Considering the …

Depth profile investigation of the incorporated iron atoms during Kr+ ion beam sputtering on Si (001)

B Khanbabaee, B Arezki, A Biermanns, M Cornejo… - Thin Solid …, 2013 - inis.iaea.org
[en] We investigate the incorporation of iron atoms during nano-patterning of Si surfaces
induced by 2 keV Kr+ ion beam erosion under an off-normal incidence angle of 15 …