Partitioning electrostatic and mechanical domains in nanoelectromechanical relays

M Shavezipur, K Harrison, WS Lee… - Journal of …, 2014 - ieeexplore.ieee.org
This paper describes the improvement of pull-in stability, contact properties, and reliability of
laterally actuated nanoelectromechanical relays by partitioning the mechanical and …
被引用次数：17 相关文章

Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays

M Shavezipur, K Harrison, WS Lee, S Mitra… - Journal of …, 2015 - infona.pl
This paper describes the improvement of pull-in stability, contact properties, and reliability of
laterally actuated nanoelectromechanical relays by partitioning the mechanical and …