J Elders, V Spiering, S Walsh - MRS Bulletin, 2001 - Springer
Microelectromechanical systems (MEMS), microsystems technology (MST), and micromachines are roughly synonymous terms applied in the United States, Europe, and …
J Elders, V Spiering, S Walsh - MRS Bulletin, 2001 - ui.adsabs.harvard.edu
Microsystems Technology (MST) and MEMS Applications: An Overview - NASA/ADS Now on home page ads icon ads Enable full ADS view NASA/ADS Microsystems Technology (MST) …
J Elders, V Spiering, S Walsh - MRS BULLETIN, 2001 - cambridge.org
Microelectromechanical systems (MEMS), microsystems technology (MST), and micromachines are roughly synonymous terms applied in the United States, Europe, and …