Microsystems Technology (MST) and MEMS applications: an overview

J Elders, V Spiering, S Walsh - MRS Bulletin, 2001 - cambridge.org
Microelectromechanical systems (MEMS), microsystems technology (MST), and
micromachines are roughly synonymous terms applied in the United States, Europe, and …
被引用次数：44 相关文章

[引用][C] Microsystems Technology (MST) and MEMS Applications: An Overview

J Elders, V Spiering, S Walsh - MRS Bulletin, 2001 - Springer
Microelectromechanical systems (MEMS), microsystems technology (MST), and
micromachines are roughly synonymous terms applied in the United States, Europe, and …

[引用][C] Microsystems Technology (MST) and MEMS Applications: An Overview

J Elders, V Spiering, S Walsh - MRS Bulletin, 2001 - ui.adsabs.harvard.edu
Microsystems Technology (MST) and MEMS Applications: An Overview - NASA/ADS Now on
home page ads icon ads Enable full ADS view NASA/ADS Microsystems Technology (MST) …

Microsystems

J Elders, V Spiering, S Walsh - MRS BULLETIN, 2001 - cambridge.org
Microelectromechanical systems (MEMS), microsystems technology (MST), and
micromachines are roughly synonymous terms applied in the United States, Europe, and …