Micromechanical" hollow-disk" ring resonators

SS Li, YW Lin, Y Xie, Z Ren… - 17th IEEE International …, 2004 - ieeexplore.ieee.org
A vibrating polysilicon micromechanical" hollow-disk" ring resonator obtained by removing
quadrants of material from a solid disk resonator, but purposely leaving intact beams of …
被引用次数：229 相关文章
[PDF] psu.edu

[PDF][PDF] MICROMECHANICAL “HOLLOW-DISK” RING RESONATORS

SS Li, YW Lin, Y Xie, Z Ren, CTC Nguyen - Citeseer
ABSTRACT A vibrating polysilicon micromechanical “hollow-disk” ring resonator obtained
by removing quadrants of material from a solid disk resonator, but purposely leaving intact …

[引用][C] Micromechanical hollow-disk ring resonators

SS LI, YW LIN, Y XIE, Z REN… - 17th IEEE International …, 2004 - pascal-francis.inist.fr
Micromechanical hollow-disk ring resonators CNRS Inist Pascal-Francis CNRS Pascal and
Francis Bibliographic Databases Simple search Advanced search Search by classification …
[PDF] berkeley.edu

[PDF][PDF] MICROMECHANICAL “HOLLOW-DISK” RING RESONATORS

SS Li, YW Lin, Y Xie, Z Ren, CTC Nguyen - people.eecs.berkeley.edu
ABSTRACT A vibrating polysilicon micromechanical “hollow-disk” ring resonator obtained
by removing quadrants of material from a solid disk resonator, but purposely leaving intact …

[引用][C] Micromechanical" Hollow-Disk" Ring Resonators

LI Sheng-Shian - IEEE MEMS 2004, Maastricht, The Netherlands …, 2004 - cir.nii.ac.jp

[引用][C] Micromechanical" hollow-disk" ring resonators

SS Li, YW Lin, Y Xie, Z Ren, CTC Nguyen - 17th IEEE International Conference … - cir.nii.ac.jp
Micromechanical "hollow-disk" ring resonators | CiNii Research CiNii 国立情報学研究所 学術
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[引用][C] Micromechanical hollow-disk ring resonators

SS LI, YW LIN, XIE YUAN, REN ZEYING… - … International Conference on …, 2004