MEMS-based humidity sensor with integrated temperature compensation mechanism
LT Chen, CY Lee, WH Cheng - Sensors and Actuators A: Physical, 2008 - Elsevier
This study applies conventional micro-electro-mechanical systems (MEMS) techniques to
develop a novel low-cost humidity sensor comprising a silicon substrate, a freestanding …
develop a novel low-cost humidity sensor comprising a silicon substrate, a freestanding …
MEMS-based humidity sensor with integrated temperature compensation mechanism
LT Chen, CY Lee, WH Cheng - Sensors and Actuators A …, 2008 - ui.adsabs.harvard.edu
This study applies conventional micro-electro-mechanical systems (MEMS) techniques to
develop a novel low-cost humidity sensor comprising a silicon substrate, a freestanding …
develop a novel low-cost humidity sensor comprising a silicon substrate, a freestanding …
[引用][C] MEMS-based humidity sensor with integrated temperature compensation mechanism
LT Chen, CY Lee, WH Cheng - Sensors and Actuators A: Physical, 2008 - cir.nii.ac.jp
MEMS-based humidity sensor with integrated temperature compensation mechanism | CiNii
Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 …
Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 …
MEMS-based humidity sensor with integrated temperature compensation mechanism
LT Chen, CY Lee, WH Cheng - Sensors & Actuators: A. Physical, 2008 - infona.pl
This study applies conventional micro-electro-mechanical systems (MEMS) techniques to
develop a novel low-cost humidity sensor comprising a silicon substrate, a freestanding …
develop a novel low-cost humidity sensor comprising a silicon substrate, a freestanding …