Cmos-integrated rf mems resonators

MK Zalalutdinov, JD Cross, JW Baldwin… - Journal of …, 2010 - ieeexplore.ieee.org
We present a design approach that enables monolithic integration of high-quality-factor (Q)
radio-frequency (RF) microelectromechanical systems (MEMS) resonators with CMOS …
被引用次数：39 相关文章
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[PDF][PDF] CMOS-Integrated RF MEMS Resonators

MK Zalalutdinov, JD Cross… - JOURNAL OF …, 2010 - parpia.lassp.cornell.edu
We present a design approach that enables mono-lithic integration of high-quality-factor (Q)
radio-frequency (RF) microelectromechanical systems (MEMS) resonators with CMOS …

CMOS-Integrated RF MEMS Resonators

MK Zalalutdinov, JD Cross, JW Baldwin, BR Ilic… - Journal of …, 2010 - infona.pl
We present a design approach that enables monolithic integration of high-quality-factor (Q)
radio-frequency (RF) microelectromechanical systems (MEMS) resonators with CMOS …

CMOS-integrated RF MEMS resonators

MK Zalalutdinov, JW Baldwin, BH Houston… - Journal of …, 2010 - elibrary.ru
We present a design approach that enables monolithic integration of high-quality-factor $(Q)
$ radio-frequency (RF) microelectromechanical systems (MEMS) resonators with CMOS …

[引用][C] CMOS-Integrated RF MEMS Resonators

MK ZALALUTDINOV, JD CROSS… - Journal of …, 2010 - pascal-francis.inist.fr
CMOS-Integrated RF MEMS Resonators CNRS Inist Pascal-Francis CNRS Pascal and
Francis Bibliographic Databases Simple search Advanced search Search by classification …

[引用][C] CMOS-Integrated RF MEMS Resonators

MK ZALALUTDINOV… - Journal of …, 2010 - Institute of Electrical and Electronics …