Mechanical property characterization of sputtered and plasma enhanced chemical deposition (PECVD) silicon nitride films after rapid thermal annealing

PH Wu, IK Lin, HY Yan, KS Ou, KS Chen… - Sensors and Actuators A …, 2011 - Elsevier
In this paper, the mechanical and fracture properties of silicon nitride films subjected to rapid
thermal annealing (RTA) have been systemically tested. The residual stress, Young's …
被引用次数：50 相关文章

Mechanical property characterization of sputtered and plasma enhanced chemical deposition (PECVD) silicon nitride films after rapid thermal annealing

PH Wu, IK Lin, HY Yan, KS Ou, KS Chen… - Sensors & Actuators: A …, 2011 - infona.pl
In this paper, the mechanical and fracture properties of silicon nitride films subjected to rapid
thermal annealing (RTA) have been systemically tested. The residual stress, Young's …

Mechanical property characterization of sputtered and plasma enhanced chemical deposition (PECVD) silicon nitride films after rapid thermal annealing

PH Wu, IK Lin, HY Yan, KS Ou… - … and Actuators A …, 2011 - ui.adsabs.harvard.edu
In this paper, the mechanical and fracture properties of silicon nitride films subjected to rapid
thermal annealing (RTA) have been systemically tested. The residual stress, Young's …

Mechanical property characterization of sputtered and plasma enhanced chemical deposition (PECVD) silicon nitride films after rapid thermal annealing

PH Wu, IK Lin, HY Yan, KS Ou… - … and Actuators, A …, 2011 - researchoutput.ncku.edu.tw
In this paper, the mechanical and fracture properties of silicon nitride films subjected to rapid
thermal annealing (RTA) have been systemically tested. The residual stress, Young's …

Mechanical property characterization of sputtered and plasma enhanced chemical deposition (PECVD) silicon nitride films after rapid thermal annealing

PH Wu, IK Lin, HY Yan, KS Ou… - … AND ACTUATORS A …, 2011 - nckur.lib.ncku.edu.tw
In this paper, the mechanical and fracture properties of silicon nitride films subjected to rapid
thermal annealing (RTA) have been systemically tested. The residual stress, Young's …