Area-selective atomic layer deposition of noble metals: polymerized fluorocarbon layers as effective growth inhibitors

P Deminskyi, A Haider, H Eren, TM Khan, N Biyikli - 2019 - chemrxiv.org
Selective deposition is a powerful self-aligned precision materials processing strategy which
can hugely benefit next-generation nanoelectronics, catalysis, and energy …

Area-Selective Atomic Layer Deposition of Noble Metals: Polymerized Fluorocarbon Layers as Effective Growth Inhibitors

P Deminskyi, A Haider, H Eren, TM Khan, N Biyikli - 2019 - europepmc.org
Selective deposition is a powerful self-aligned precision materials processing strategy which
can hugely benefit next-generation nanoelectronics, catalysis, and energy …

[PDF][PDF] Area-selective atomic layer deposition of noble metals: polymerized fluorocarbon layers as effective growth inhibitors

P Deminskyi, A Haider, H Eren, TM Khan, N Biyikli - pure.tudelft.nl
2 hydroxyl group formation on CFx surface. Our work reveals that CFx layer is compatible
with ozone co-reactant until the blocking polymer cannot withstand oxygen physisorption …

Area-Selective Atomic Layer Deposition of Noble Metals: Polymerized Fluorocarbon Layers as Effective Growth Inhibitors

P Deminskyi, A Haider, H Eren, TM Khan, N Biyikli - 2019 - chemrxiv.org
Selective deposition is a powerful self-aligned precision materials processing strategy which
can hugely benefit next-generation nanoelectronics, catalysis, and energy …

[PDF][PDF] Area-Selective Atomic Layer Deposition of Noble Metals: Polymerized Fluorocarbon Layers as Effective Growth Inhibitors

P Deminskyi, A Haider, H Eren, TM Khan, N Biyikli - scholar.archive.org
The increasingly complex nanoscale three-dimensional (3D) and multi-layered structures
utilized in nanoelectronic, catalytic, and energy conversion/storage devices, necessitating …

[PDF][PDF] Area-selective atomic layer deposition of noble metals: pol-ymerized fluorocarbon layers as effective growth inhibitors

P Deminskyi, A Haider, H Eren, TM Khan, N Biyikli - researchgate.net
The increasingly complex nanoscale three-dimensional (3D) and multi-layered structures
utilized in nanoelectronic, catalytic, and energy conversion/storage devices, necessitating …

[PDF][PDF] Area-Selective Atomic Layer Deposition of Noble Metals: Polymerized Fluorocarbon Layers as Effective Growth Inhibitors

P Deminskyi, A Haider, H Eren, TM Khan, N Biyikli - … .s3.amazonaws.com
The increasingly complex nanoscale three-dimensional (3D) and multi-layered structures
utilized in nanoelectronic, catalytic, and energy conversion/storage devices, necessitating …

[PDF][PDF] Area-selective atomic layer deposition of noble metals: pol-ymerized fluorocarbon layers as effective growth inhibitors

P Deminskyi, A Haider, H Eren, TM Khan, N Biyikli - academia.edu
The increasingly complex nanoscale three-dimensional (3D) and multi-layered structures
utilized in nanoelectronic, catalytic, and energy conversion/storage devices, necessitating …

[PDF][PDF] Area-Selective Atomic Layer Deposition of Noble Metals: Polymerized Fluorocarbon Layers as Effective Growth Inhibitors

P Deminskyi, A Haider, H Eren, TM Khan, N Biyikli - … .s3.amazonaws.com
The increasingly complex nanoscale three-dimensional (3D) and multi-layered structures
utilized in nanoelectronic, catalytic, and energy conversion/storage devices, necessitating …

Area-Selective Atomic Layer Deposition of Noble Metals: Polymerized Fluorocarbon Layers as Effective Growth Inhibitors

P Deminskyi, A Haider, H Eren, TM Khan, N Biyikli - 2019 - europepmc.org
Selective deposition is a powerful self-aligned precision materials processing strategy which
can hugely benefit next-generation nanoelectronics, catalysis, and energy …