Scanning probe techniques for the electrical characterization of semiconductor devices

JJ Kopanski - Solid State Technology, 1995 - go.gale.com
The spatial resolution, sensitivity, and accuracy required for electrical characterization of
device structures in the semiconductor industry suggest that scanning probe microscopy …
被引用次数：17 相关文章

Scanned Probe Techniques for the Electrical Characterization of Semiconductor Devices

JA Dagata, J Kopanski - 1995 - nist.gov
The spatial resolution, sensitivity, and accuracy required for electrical characterization of
device structures in the semiconductor industry suggest that scanned probe microscopy …

Scanned Probe Techniques for the Electrical Characterization of Semiconductor Devices

JA Dagata, J Kopanski - 1995 - nist.gov
The spatial resolution, sensitivity, and accuracy required for electrical characterization of
device structures in the semiconductor industry suggest that scanned probe microscopy …