RF MEMS oscillator with integrated resistive transduction

RB Reichenbach, M Zalalutdinov… - IEEE electron device …, 2006 - ieeexplore.ieee.org
A method to integrate micromechanical frequency-determining elements along with the
corresponding electromechanical transducers into a poly or single-crystal silicon film layer is …
被引用次数：33 相关文章

RF MEMS Oscillator with Integrated Resistive Transduction

RB Reichenbach, M Zalalutdinov, JM Parpia… - IEEE Electron Device …, 2006 - infona.pl
A method to integrate micromechanical frequency-determining elements along with the
corresponding electromechanical transducers into a poly or single-crystal silicon film layer is …

[引用][C] RF MEMS oscillator with integrated resistive transduction

RB REICHENBACH… - IEEE electron …, 2006 - pascal-francis.inist.fr
RF MEMS oscillator with integrated resistive transduction CNRS Inist Pascal-Francis CNRS
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[引用][C] RF MEMS Oscillator with Integrated Resistive Transduction

RB Reichenbach, M Zalalutdinov… - IEEE Electron …, 2006 - ui.adsabs.harvard.edu
RF MEMS Oscillator with Integrated Resistive Transduction - NASA/ADS Now on home page
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[PDF][PDF] RF MEMS Oscillator with Integrated Resistive Transduction

RB Reichenbach, M Zalalutdinov… - IEEE ELECTRON …, 2006 - parpia.lassp.cornell.edu
A method to integrate micromechanical frequen-cy-determining elements along with the
corresponding electromechanical transducers into a poly or single-crystal silicon film layer is …

[引用][C] RF MEMS oscillator with integrated resistive transduction

RB REICHENBACH… - IEEE electron …, 2006 - Institute of Electrical and Electronics …