H Taniguchi - US Patent 8,615,026, 2013 - freepatentsonline.com
A method of manufacturing a semiconductor optical device including a semiconductor layer includes: forming a semiconductor layer; forming a first dielectric film on a first region of a …
H Taniguchi - US Patent App. 13/382,599, 2012 - Google Patents
(57) ABSTRACT A method of manufacturing a semiconductor optical device including a semiconductor layer includes: forming a semi conductor layer, forming a first dielectric film …