Method of manufacturing semiconductor optical device, method of manufacturing semiconductor optical laser element, and semiconductor optical device

H Taniguchi - US Patent 8,615,026, 2013 - Google Patents
(57) ABSTRACT A method of manufacturing a semiconductor optical device including a
semiconductor layer includes: forming a semi conductor layer, forming a first dielectric film …

Method of manufacturing semiconductor optical device, method of manufacturing semiconductor optical laser element, and semiconductor optical device

H Taniguchi - US Patent 8,615,026, 2013 - freepatentsonline.com
A method of manufacturing a semiconductor optical device including a semiconductor layer
includes: forming a semiconductor layer; forming a first dielectric film on a first region of a …

Method of manufacturing semiconductor optical device, method of manufacturing semiconductor optical laser element, and semiconductor optical device

H Taniguchi - US Patent App. 13/382,599, 2012 - Google Patents
(57) ABSTRACT A method of manufacturing a semiconductor optical device including a
semiconductor layer includes: forming a semi conductor layer, forming a first dielectric film …

METHOD OF MANUFACTURING SEMICONDUCTOR OPTICAL DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR OPTICAL LASER ELEMENT, AND …

H Taniguchi - US Patent App. 13/382,599, 2012 - freepatentsonline.com
METHOD OF MANUFACTURING SEMICONDUCTOR OPTICAL DEVICE, METHOD OF
MANUFACTURING SEMICONDUCTOR OPTICAL LASER ELEMENT, AND …