The fast‐moving world of MEMS technology

R Bogue - Assembly Automation, 2009 - emerald.com
Purpose–The purpose of this paper is to provide a technical review of silicon micro‐
electromechanical systems (MEMS) technology and its applications. Design/methodology …
被引用次数：15 相关文章

The fast-moving world of MEMS technology

R Bogue - Assembly Automation, 2009 - ingentaconnect.com
Purpose‐The purpose of this paper is to provide a technical review of silicon micro-
electromechanical systems (MEMS) technology and its applications. Design/methodology …

The fast‐moving world of MEMS technology

R Bogue - Assembly Automation, 2009 - cir.nii.ac.jp
抄録< jats: sec>< jats: title content-type=" abstract-heading"> Purpose</jats: title>< jats: p>
The purpose of this paper is to provide a technical review of silicon micro‐electromechanical …

[引用][C] The fast-moving world of MEMS technology

R Bogue - Assembly Automation, 2009 - Emerald Group Publishing, Limited