Intensified chipping during nanoindentation and the effect of friction on the interfacial fracture for thin films used in N/MEMS

R Dash, K Bhattacharyya, RP Kumar… - Engineering …, 2022 - iopscience.iop.org
Nanoindentation was performed on Ti-B-Si-C and SiCN films deposited on Si substrates at
varying loads and depths of penetrations. The intensity of chipping got enhanced with an …
被引用次数：18 相关文章

Intensified chipping during nanoindentation and the effect of friction on the interfacial fracture for thin films used in N/MEMS

R Dash, K Bhattacharyya, RP Kumar… - Engineering …, 2022 - ui.adsabs.harvard.edu
Nanoindentation was performed on Ti-B-Si-C and SiCN films deposited on Si substrates at
varying loads and depths of penetrations. The intensity of chipping got enhanced with an …
[PDF] researchgate.net

[PDF][PDF] Intensified chipping during nanoindentation and the effect of friction on the interfacial fracture for thinfilms used in N/MEMS

R Dash, K Bhattacharyya, RP Kumar… - 2022 - researchgate.net
Nanoindentation was performed on Ti-B-Si-C and SiCNfilms deposited on Si substrates at
varying loads and depths of penetrations. The intensity of chipping got enhanced with an …