Electrical aging of a piezoelectric MEMS fast steering mirror and its impact on reliability

W Zhu, Y Su, S Gao, X Li, Y Zhang, L Wang… - Sensors and Actuators A …, 2024 - Elsevier
Reliability is a critical characteristic of aerospace-grade components, particularly fast
steering mirror (FSM), which is one of the key devices in Free-Space laser communication …
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Electrical Aging of a Piezoelectric Mems Fast Steering Mirror and its Impact on Reliability

W Zhu, Y Su, S Gao, X Li, Z Yonggui, W Lihao… - Available at SSRN … - papers.ssrn.com
Reliability is a critical characteristic of aerospace-grade components, particularly fast
steering mirror (FSM), which is one of the key devices in Free-Space laser communication …