Piezoresistive nanomechanical humidity sensors using internal stress in-plane of Si-polymer composite membranes

MM Hossain, M Toda, T Hokama… - IEEE Sensors …, 2019 - ieeexplore.ieee.org
This article presents the design and fabrication process of a highly miniaturized
nanomechanical Si-polymer composite membrane-type internal-stress sensor (MIS) with …
被引用次数：15 相关文章
[PDF] researchgate.net

[PDF][PDF] Piezoresistive Nanomechanical Humidity Sensors Using Internal Stress In-Plane of Si-Polymer Composite Membranes

MM Hossain, M Toda, T Hokama, M Yamazaki… - 2019 - researchgate.net
This article presents the design and fabrication process of a highly miniaturized
nanomechanical Si-polymer composite membrane-type internal-stress sensor (MIS) with …
[PDF] archive.org

[PDF][PDF] Piezoresistive Nanomechanical Humidity Sensors Using Internal Stress In-Plane of Si-Polymer Composite Membranes

MM Hossain, M Toda, T Hokama, M Yamazaki… - 2019 - scholar.archive.org
This article presents the design and fabrication process of a highly miniaturized
nanomechanical Si-polymer composite membrane-type internal-stress sensor (MIS) with …

Piezoresistive Nanomechanical Humidity Sensors Using Internal Stress In-Plane of Si-Polymer Composite Membranes

MM Hossain, M Toda, T Hokama… - IEEE Sensors …, 2019 - tohoku.elsevierpure.com
This article presents the design and fabrication process of a highly miniaturized
nanomechanical Si-polymer composite membrane-type internal-stress sensor (MIS) with …
[PDF] academia.edu

[PDF][PDF] Piezoresistive nanomechanical humidity sensors using internal stress in-plane of Si-polymer composite membranes

MM Hossain, M Toda, T Hokama, M Yamazaki - academia.edu
This paper presents the design and fabrication process of a highly miniaturized
nanomechanical Sipolymer composite membrane-type internal-stress sensor (MIS) with …