A multimetal surface micromachining process for tunable RF MEMS passives

Y Shim, Z Wu, M Rais-Zadeh - Journal of …, 2012 - ieeexplore.ieee.org
This paper reports on a microfabrication technology for implementing high-performance
passive components suitable for advanced RF front-ends. This technology offers three metal …
被引用次数：22 相关文章
[PDF] psu.edu

[PDF][PDF] A Multimetal Surface Micromachining Process for Tunable RF MEMS Passives

Y Shim, Z Wu, M Rais-Zadeh - Citeseer
This paper reports on a microfabrication technology for implementing high-performance
passive components suitable for advanced RF front-ends. This technology offers three metal …

[引用][C] A Multimetal Surface Micromachining Process for Tunable RF MEMS Passives

Y SHIM, Z WU, M RAIS-ZADEH - Journal of …, 2012 - pascal-francis.inist.fr
A Multimetal Surface Micromachining Process for Tunable RF MEMS Passives CNRS Inist
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[PDF] archive.org

[PDF][PDF] A Multimetal Surface Micromachining Process for Tunable RF MEMS Passives

Y Shim, Z Wu, M Rais-Zadeh - scholar.archive.org
This paper reports on a microfabrication technology for implementing high-performance
passive components suitable for advanced RF front-ends. This technology offers three metal …
[PDF] researchgate.net

[PDF][PDF] A Multimetal Surface Micromachining Process for Tunable RF MEMS Passives

Y Shim, Z Wu, M Rais-Zadeh - researchgate.net
This paper reports on a microfabrication technology for implementing high-performance
passive components suitable for advanced RF front-ends. This technology offers three metal …
[PDF] umich.edu

[PDF][PDF] A Multimetal Surface Micromachining Process for Tunable RF MEMS Passives

Y Shim, Z Wu, M Rais-Zadeh - JOURNAL OF …, 2012 - eecs.umich.edu
This paper reports on a microfabrication technology for implementing high-performance
passive components suitable for advanced RF front-ends. This technology offers three metal …

A Multimetal Surface Micromachining Process for Tunable RF MEMS Passives

Y Shim, Z Wu, M Rais-Zadeh - Journal of Microelectromechanical Systems, 2012 - infona.pl
This paper reports on a microfabrication technology for implementing high-performance
passive components suitable for advanced RF front-ends. This technology offers three metal …

[引用][C] A Multimetal Surface Micromachining Process for Tunable RF MEMS Passives

Y SHIM, Z WU, M RAIS-ZADEH - Journal of …, 2012 - Institute of Electrical and Electronics …