Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

AR Krauss, O Auciello, DM Gruen, A Jayatissa… - Diamond and Related …, 2001 - Elsevier
MEMS devices are currently fabricated primarily in silicon because of the available surface
machining technology. A major problem with the Si-based MEMS technology is that Si has …
被引用次数：474 相关文章
[PDF] researchgate.net

[PDF][PDF] Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

AR Kraussa, O Aucielloa, DM Gruena… - Diamond and Related …, 2001 - researchgate.net
Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices
Page 1 Ž . Diamond and Related Materials 10 2001 19521961 Ultrananocrystalline diamond …
[PDF] academia.edu

[PDF][PDF] Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

AR Kraussa, O Aucielloa, DM Gruena… - Diamond and Related …, 2001 - academia.edu
Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices
Page 1 Ž . Diamond and Related Materials 10 2001 19521961 Ultrananocrystalline diamond …

[引用][C] Ultrananocrystalline diamond thin-films for MEMS and moving mechanical assembly devices

AR Krauss, O Auciello, DM Gruen, A Jayatissa… - 2001 - publica.fraunhofer.de

Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

AR Krauss, O Auciello, DM Gruen… - Diamond and …, 2001 - ui.adsabs.harvard.edu
MEMS devices are currently fabricated primarily in silicon because of the available surface
machining technology. A major problem with the Si-based MEMS technology is that Si has …

[引用][C] Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

AR KRAUSS, O AUCIELLO… - Diamond and …, 2001 - pascal-francis.inist.fr
Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly
devices CNRS Inist Pascal-Francis CNRS Pascal and Francis Bibliographic Databases …

[引用][C] Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

AR Krauss, O Auciello, DM Gruen, A Jayatissa… - Diamond and Related …, 2001 - cir.nii.ac.jp
Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly
devices | CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 …

Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

AR Krauss, O Auciello, DM Gruen, A Jayatissa… - Diamond & Related …, 2001 - infona.pl
MEMS devices are currently fabricated primarily in silicon because of the available surface
machining technology. A major problem with the Si-based MEMS technology is that Si has …

Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices.

AR Krauss, DM Gruen, A Jayatissa, A Sumant… - Diamond Related …, 2001 - osti.gov
MEMS devices are currently fabricated primarily in silicon because of the available surface
machining technology. A major problem with the Si-based MEMS technology is that Si has …

[引用][C] Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

AR Krauss, O Auciello, DM Gruen… - Diamond and …, 2001 - ui.adsabs.harvard.edu
Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices -
NASA/ADS Now on home page ads icon ads Enable full ADS view NASA/ADS …