Area-selective atomic layer deposition of noble metals: Polymerized fluorocarbon layers as effective growth inhibitors

P Deminskyi, A Haider, H Eren, TM Khan… - Journal of Vacuum …, 2021 - pubs.aip.org
The increasingly complex nanoscale three-dimensional and multilayered structures utilized
in nanoelectronic, catalytic, and energy conversion/storage devices necessitate novel …

Area-selective atomic layer deposition of noble metals: Polymerized fluorocarbon layers as effective growth inhibitors

P Deminskyi, A Haider, H Eren, TM Khan… - Journal of Vacuum …, 2021 - pubs.aip.org
The increasingly complex nanoscale three-dimensional and multilayered structures utilized
in nanoelectronic, catalytic, and energy conversion/storage devices necessitate novel …

Area-selective atomic layer deposition of noble metals: Polymerized fluorocarbon layers as effective growth inhibitors

P Deminskyi, A Haider, H Eren… - Journal of Vacuum …, 2021 - research.tudelft.nl
The increasingly complex nanoscale three-dimensional and multilayered structures utilized
in nanoelectronic, catalytic, and energy conversion/storage devices necessitate novel …

[引用][C] Area-selective atomic layer deposition of noble metals: Polymerized fluorocarbon layers as effective growth inhibitors

P Deminskyi, A Haider, H Eren… - Journal of Vacuum …, 2021 - ui.adsabs.harvard.edu
Area-selective atomic layer deposition of noble metals: Polymerized fluorocarbon layers as
effective growth inhibitors - NASA/ADS Now on home page ads icon ads Enable full ADS …

[PDF][PDF] Area-selective atomic layer deposition of noble metals: Polymerized fluorocarbon layers as effective growth inhibitors

P Deminskyi, A Haider, H Eren - Journal of Vacuum …, 2021 - repository.bilkent.edu.tr
The increasingly complex nanoscale three-dimensional and multilayered structures utilized
in nanoelectronic, catalytic, and energy conversion/storage devices necessitate novel …

Area-selective atomic layer deposition of noble metals: Polymerized fluorocarbon layers as effective growth inhibitors

P Deminskyi, A Haider, H Eren, TM Khan, N Biyikli - 2021 - aperta.ulakbim.gov.tr
The increasingly complex nanoscale three-dimensional and multilayered structures utilized
in nanoelectronic, catalytic, and energy conversion/storage devices necessitate novel …

[PDF][PDF] Area-selective atomic layer deposition of noble metals: Polymerized fluorocarbon layers as effective growth inhibitors

P Deminskyi, A Haider, H Eren - Journal of Vacuum …, 2021 - repository.bilkent.edu.tr
The increasingly complex nanoscale three-dimensional and multilayered structures utilized
in nanoelectronic, catalytic, and energy conversion/storage devices necessitate novel …