Support loss in micromechanical disk resonators

Z Hao - 18th IEEE International Conference on Micro Electro …, 2005 - ieeexplore.ieee.org
In light of recent efforts to implement micromechanical resonators with high-Q and high
frequency, an analytical model for support loss in micromechanical disk resonators has …
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[PDF][PDF] SUPPORT LOSS IN MICROMECHANICAL DISK RESONATORS

Z Hao, F Ayazi - scholar.archive.org
In light of recent efforts to implement micromechanical resonators with high-Q and high
frequency, an analytical model for support loss in micromechanical disk resonators has …