Wafer-level heterogeneous integration for MOEMS, MEMS, and NEMS

M Lapisa, G Stemme, F Niklaus - IEEE Journal of Selected …, 2011 - ieeexplore.ieee.org
Wafer-level heterogeneous integration technologies for microoptoelectromechanical
systems (MOEMS), microelectromechanical systems (MEMS), and nanoelectromechanical …
被引用次数：157 相关文章

[引用][C] Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS

M Lapisa, G Stemme, F Niklaus - IEEE Journal of Selected Topics in …, 2011 - cir.nii.ac.jp
Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS | CiNii Research CiNii
国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 論文・データを …

Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS

M Lapisa, G Stemme, F Niklaus - IEEE Journal of Selected Topics in …, 2011 - swepub.kb.se
Wafer-level heterogeneous integration technologies for microoptoelectromechanical
systems (MOEMS), microelectromechanical systems (MEMS), and nanoelectromechanical …
[PDF] berkeley.edu

[PDF][PDF] Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS

M Lapisa, G Stemme, F Niklaus - IEEE JOURNAL OF …, 2011 - people.eecs.berkeley.edu
Wafer-level heterogeneous integration technologies for microoptoelectromechanical
systems (MOEMS), microelectromechanical systems (MEMS), and nanoelectromechanical …

Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS

M Lapisa, G Stemme, F Niklaus - IEEE Journal of Selected Topics in …, 2011 - infona.pl
Wafer-level heterogeneous integration technologies for microoptoelectromechanical
systems (MOEMS), microelectromechanical systems (MEMS), and nanoelectromechanical …

Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS

M Lapisa, G Stemme, F Niklaus - IEEE Journal of Selected Topics in …, 2011 - diva-portal.org
Wafer-level heterogeneous integration technologies for microoptoelectromechanical
systems (MOEMS), microelectromechanical systems (MEMS), and nanoelectromechanical …
[PDF] researchgate.net

[PDF][PDF] Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS

M Lapisa, G Stemme, F Niklaus - researchgate.net
Wafer-level heterogeneous integration technologies for microoptoelectromechanical
systems (MOEMS), microelectromechanical systems (MEMS), and nanoelectromechanical …

[引用][C] Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS

M Lapisa, G Stemme, F Niklaus - IEEE Journal of Selected …, 2011 - ui.adsabs.harvard.edu
Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS - NASA/ADS Now on
home page ads icon ads Enable full ADS view NASA/ADS Wafer-Level Heterogeneous …

[引用][C] Wafer level heterogeneous integration for MOEMS, MEMS, and NEMS

M LAPISA - IEEE Journal of Selected Topics in Quantum …, 2011 - cir.nii.ac.jp
Wafer level heterogeneous integration for MOEMS, MEMS, and NEMS | CiNii Research
CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 論文・データを …