Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

J Verd, J Teva, JL Lopez, F Torres… - IEEE Electron …, 2006 - ieeexplore.ieee.org
A bridge-shaped first-lateral-mode 60-MHz mechanical resonator, which is monolithically
integrated with capacitive CMOS readout electronics, is presented. The resonator is …
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[PDF] academia.edu

[PDF][PDF] Integrated CMOS–MEMS With On-Chip Readout Electronics for High-Frequency Applications

J Verd, A Uranga, J Teva, JL López… - IEEE ELECTRON …, 2006 - academia.edu
A bridge-shaped first-lateral-mode 60-MHz mechan-ical resonator, which is monolithically
integrated with capacitive CMOS readout electronics, is presented. The resonator is …

[引用][C] Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

J VERD, A URANGA, J TEVA… - IEEE electron …, 2006 - pascal-francis.inist.fr
Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications CNRS
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Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

J Verd, A Uranga, J Teva, JL López… - IEEE Electron …, 2006 - portalrecerca.uab.cat
A bridge-shaped first-lateral-mode 60-MHz mechanical resonator, which is monolithically
integrated with capacitive CMOS readout electronics, is presented. The resonator is …

[引用][C] Integrated CMOS MEMS With On-Chip Readout Electronics for High-Frequency Applications

J Verd, A Uranga, J Teva, JL Lopez… - IEEE Electron …, 2006 - ui.adsabs.harvard.edu
Integrated CMOS MEMS With On-Chip Readout Electronics for High-Frequency Applications -
NASA/ADS Now on home page ads icon ads Enable full ADS view NASA/ADS Integrated CMOS …

[引用][C] Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

J Verd, A Uranga, J Teva, JL Lopez, F Torres… - IEEE Electron Device …, 2006 - cir.nii.ac.jp
Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications | CiNii
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[PDF] researchgate.net

[PDF][PDF] Integrated CMOS–MEMS With On-Chip Readout Electronics for High-Frequency Applications

J Verd, A Uranga, J Teva, JL López… - IEEE ELECTRON …, 2006 - researchgate.net
A bridge-shaped first-lateral-mode 60-MHz mechan-ical resonator, which is monolithically
integrated with capacitive CMOS readout electronics, is presented. The resonator is …

[引用][C] Integrated CMOS-MEMS with on chip read-out electronics for high frequency applications

J Verd, A Uranga, J Teva, JL López… - IEEE Electron …, 2006 - portalrecerca.uab.cat
Integrated CMOS-MEMS with on chip read-out electronics for high frequency applications
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[PDF] academia.edu

[PDF][PDF] Integrated CMOS–MEMS With On-Chip Readout Electronics for High-Frequency Applications

J Verd, A Uranga, J Teva, JL López… - IEEE ELECTRON …, 2006 - academia.edu
A bridge-shaped first-lateral-mode 60-MHz mechan-ical resonator, which is monolithically
integrated with capacitive CMOS readout electronics, is presented. The resonator is …

[引用][C] Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

J VERD, A URANGA, J TEVA… - IEEE electron …, 2006 - Institute of Electrical and Electronics …