Micro and nano fabrication

HH Gatzen, V Saile, J Leuthold - Springer
Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) are
miniaturized devices, quite often with a transducer function, and with the smallest structural …
被引用次数：87 相关文章

[图书][B] Micro and Nano Fabrication: Tools and Processes

HH Gatzen, V Saile, J Leuthold - 2015 - books.google.com
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS)
production, each product requires a unique process technology. This book provides a …

[引用][C] Micro and nano fabrication: Tools and processes

HH Gatzen, V Saile, J Leuthold - 2015 - research-collection.ethz.ch
Micro and nano fabrication: Tools and processes - Research Collection Header Upper
Right Menu Log in de jump to https://www.ethz.ch Research Collection Toggle navigation …

[引用][C] Micro and nano fabrication: tools and processes

HH Gatzen, V Saile, J Leuthold - 2015 - library.wur.nl
Micro and nano fabrication : tools and processes | Wageningen University and Research
Library catalog wur logo Wageningen University and Research Library catalog Guest user (warning) …

Micro and Nano Fabrication Tools and Processes

HH Gatzen, V Saile, J Leuthold - Springer
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS)
production, each product requires a unique process technology. This book provides a …