Low-k films modification under EUV and VUV radiation
TV Rakhimova, AT Rakhimov… - Journal of Physics D …, 2013 - iopscience.iop.org
Modification of ultra-low-k films by extreme ultraviolet (EUV) and vacuum ultraviolet (VUV)
emission with 13.5, 58.4, 106, 147 and 193 nm wavelengths and fluences up to 6× 10 18 …
emission with 13.5, 58.4, 106, 147 and 193 nm wavelengths and fluences up to 6× 10 18 …
[引用][C] Low-k films modification under EUV and VUV radiation
T Rakhimova, A Rakhimov, YA Mankelevich… - 2014 - imec-publications.be
Low-k films modification under EUV and VUV radiation Toggle navigation My submissions Login
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[引用][C] Low-k films modification under EUV and VUV radiation
TV Rakhimova, AT Rakhimov, YA Mankelevich… - Journal of Physics D …, 2014 - elibrary.ru
Low-k films modification under EUV and VUV radiation
TV Rakhimova, AT Rakhimov, YA Mankelevich… - Journal of Physics. D …, 2014 - osti.gov
Modification of ultra-low-k films by extreme ultraviolet (EUV) and vacuum ultraviolet (VUV)
emission with 13.5, 58.4, 106, 147 and 193 nm wavelengths and fluences up to 6× 10 {sup …
emission with 13.5, 58.4, 106, 147 and 193 nm wavelengths and fluences up to 6× 10 {sup …
Low-k films modification under EUV and VUV radiation
TV Rakhimova, AT Rakhimov… - Journal of Physics …, 2014 - ui.adsabs.harvard.edu
Modification of ultra-low-k films by extreme ultraviolet (EUV) and vacuum ultraviolet (VUV)
emission with 13.5, 58.4, 106, 147 and 193 nm wavelengths and fluences up to 6× 10 18 …
emission with 13.5, 58.4, 106, 147 and 193 nm wavelengths and fluences up to 6× 10 18 …
Low-k films modification under EUV and VUV radiation
TV Rakhimova, AT Rakhimov… - Journal of Physics. D …, 2014 - inis.iaea.org
[en] Modification of ultra-low-k films by extreme ultraviolet (EUV) and vacuum ultraviolet
(VUV) emission with 13.5, 58.4, 106, 147 and 193 nm wavelengths and fluences up to 6× 10 …
(VUV) emission with 13.5, 58.4, 106, 147 and 193 nm wavelengths and fluences up to 6× 10 …
[PDF][PDF] Low-k films modification under EUV and VUV radiation
TV Rakhimova, AT Rakhimov… - J. Phys. D: Appl …, 2014 - researchgate.net
Modification of ultra-low-k films by extreme ultraviolet (EUV) and vacuum ultraviolet (VUV)
emission with 13.5, 58.4, 106, 147 and 193 nm wavelengths and fluences up to 6× 1018 …
emission with 13.5, 58.4, 106, 147 and 193 nm wavelengths and fluences up to 6× 1018 …