[图书][B] Mems/Nems:(1) Handbook techniques and applications design methods,(2) Fabrication techniques,(3) manufacturing methods,(4) Sensors and actuators,(5) …

CT Leondes - 2007 - books.google.com
As miniaturization, batch fabrication, and integrated electronics rapidly enable the
development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating …
被引用次数：162 相关文章

Mems/Nems (1) Handbook Techniques and Applications Design Methods,(2) Fabrication Techniques,(3) Manufacturing Methods,(4) Sensors and Actuators,(5) …

CT Leondes - Springer
As miniaturization, batch fabrication, and integrated electronics rapidly enable the
development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating …

[引用][C] MEMS/NEMS: handbook techniques and applications

CT Leondes - (No Title) - cir.nii.ac.jp
MEMS/NEMS : handbook techniques and applications | CiNii Research CiNii 国立情報学
研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 論文・データをさがす 大学 …