Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices …
From the Publisher: Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electrical, optical, and other components on a substrate to …
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices …