Optimized actuation of resonant MEMS mirrors for laser beam scanning applications

D Terzi, L De Biasi, M Boschi - MOEMS and Miniaturized …, 2022 - spiedigitallibrary.org
The present paper on regards the improvement of the way one resonant MEMS (Micro
Electro-Mechanical System) micro-mirror is usually controlled to project the wanted laser …
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Optimized actuation of resonant MEMS mirrors for laser beam scanning applications

D Terzia, L De Biasia, M Boschia - Proc. of SPIE Vol - spiedigitallibrary.org
The present paper on regards the improvement of the way one resonant MEMS (Micro
Electro-Mechanical System) micro-mirror is usually controlled to project the wanted laser …

Optimized actuation of resonant MEMS mirrors for laser beam scanning applications

D Terzi, L De Biasi, M Boschi - MOEMS and Miniaturized …, 2022 - ui.adsabs.harvard.edu
The present paper on regards the improvement of the way one resonant MEMS (Micro
Electro-Mechanical System) micro-mirror is usually controlled to project the wanted laser …