ZnO on nickel RF micromechanical resonators for monolithic wireless communication applications

M Wei, A Avila, I Rivera, M Baghelani… - … of Micromechanics and …, 2017 - iopscience.iop.org
On-chip integrability of high-Q RF passives alongside CMOS transistors is crucial for the
implementation of monolithic radio transceivers. One of the most significant bottlenecks in …

ZnO on nickel RF micromechanical resonators for monolithic wireless communication applications

M Wei, A Avila, I Rivera, J Wang… - … of Micromechanics and …, 2017 - inis.iaea.org
[en] On-chip integrability of high-Q RF passives alongside CMOS transistors is crucial for the
implementation of monolithic radio transceivers. One of the most significant bottlenecks in …

ZnO on nickel RF micromechanical resonators for monolithic wireless communication applications

M Wei, A Avila, I Rivera… - Journal of …, 2017 - ui.adsabs.harvard.edu
On-chip integrability of high-Q RF passives alongside CMOS transistors is crucial for the
implementation of monolithic radio transceivers. One of the most significant bottlenecks in …