Dependence of dielectric constant of SiOCH low-k films on porosity and pore size

A Palov, TV Rakhimova, MB Krishtab… - Journal of Vacuum …, 2015 - pubs.aip.org
A simple, clear, and robust numerical approach to calculate dielectric constant of porous
organosilicate (SiOCH) based films with arbitrary shaped pores is proposed. The …
被引用次数：24 相关文章

[引用][C] Dependence of dielectric constant of SiOCH low-k films on porosity and pore size

A Palov, TV Rakhimova, MB Krishtab… - Journal of Vacuum …, 2015 - elibrary.ru
[PDF] academia.edu

[PDF][PDF] Dependence of dielectric constant of SiOCH low-k films on porosity and pore size

A Palov, TV Rakhimova, MB Krishtab… - Journal of Vacuum …, 2015 - academia.edu
A simple, clear, and robust numerical approach to calculate dielectric constant of porous
organosilicate (SiOCH) based films with arbitrary shaped pores is proposed. The …

[引用][C] Dependence of dielectric constant of SiOCH low-k films on porosity and pore size

A Palov, TV Rakhimova, MB Krishtab… - Journal of Vacuum …, 2015 - ui.adsabs.harvard.edu
Dependence of dielectric constant of SiOCH low-k films on porosity and pore size - NASA/ADS
Now on home page ads icon ads Enable full ADS view NASA/ADS Dependence of dielectric …

Dependence of dielectric constant of SiOCH low-k films on porosity and pore size

A Palov, TV Rakhimova, MB Krishtab… - Journal of Vacuum …, 2015 - pubs.aip.org
A simple, clear, and robust numerical approach to calculate dielectric constant of porous
organosilicate (SiOCH) based films with arbitrary shaped pores is proposed. The …
[PDF] academia.edu

[PDF][PDF] Dependence of dielectric constant of SiOCH low-k films on porosity and pore size

A Palov, TV Rakhimova, MB Krishtab… - Journal of Vacuum …, 2015 - academia.edu
A simple, clear, and robust numerical approach to calculate dielectric constant of porous
organosilicate (SiOCH) based films with arbitrary shaped pores is proposed. The …