Etch-resistant protective coating for a magnetic tunnel junction device
A method of forming a magnetic tunnel junction (MTJ) device includes forming a spacer on
an exposed side portion of the MTJ device. The method further includes forming an etch …
an exposed side portion of the MTJ device. The method further includes forming an etch …
Etch-resistant protective coating for a magnetic tunnel junction device
Y Lu, C Park, WC Chen - US Patent App. 14/286,518, 2015 - Google Patents
0002 Advances in technology have resulted in smaller and more powerful computing
devices. For example, there currently exist a variety of portable personal computing devices …
devices. For example, there currently exist a variety of portable personal computing devices …
Etch-resistant protective coating for a magnetic tunnel junction device
Y Lu, C Park, W Chen - US Patent 9,349,939, 2016 - freepatentsonline.com
A method of forming a magnetic tunnel junction (MTJ) device includes forming a spacer on
an exposed side portion of the MTJ device. The method further includes forming an etch …
an exposed side portion of the MTJ device. The method further includes forming an etch …
ETCH-RESISTANT PROTECTIVE COATING FOR A MAGNETIC TUNNEL JUNCTION DEVICE
Y Lu, C Park, W Chen - US Patent App. 14/286,518, 2015 - freepatentsonline.com
A method of forming a magnetic tunnel junction (MTJ) device includes forming a spacer on
an exposed side portion of the MTJ device. The method further includes forming an etch …
an exposed side portion of the MTJ device. The method further includes forming an etch …