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Development and investigation of high resolution resonant pressure sensor with optical interrogation

M Jozwik, C Gorecki, A Sabac, D Heinis… - Optical …, 2005 - spiedigitallibrary.org
In this paper we present a new family of MOEMS device, which can be used as high
resolution optical resonant pressure sensor. The architecture contains a membrane loaded …
被引用次数：6 相关文章

[引用][C] Development and investigation of high resolution resonant pressure sensor with optical interrogation

M Jozwik, C Gorecki, A Sabac, D Heinis… - Proc. of SPIE, Optical …, 2005 - hal.science
Development and investigation of high resolution resonant pressure sensor with optical
interrogation - Archive ouverte HAL Accéder directement au contenu Documentation FR …

Development and investigation of high resolution resonant pressure sensor with optical interrogation

M Jozwik, C Gorecki, A Sabac… - Optical …, 2005 - ui.adsabs.harvard.edu
In this paper we present a new family of MOEMS device, which can be used as high
resolution optical resonant pressure sensor. The architecture contains a membrane loaded …

Development and investigation of high resolution resonant pressure sensor with optical interrogation

M Jozwik, C Gorecki, A Sabac, D Heinis, T Dean - spiedigitallibrary.org
In this paper we present a new family of MOEMS device, which can be used as high
resolution optical resonant pressure sensor. The architecture contains a membrane loaded …