Improvement of endurance in HZO-based ferroelectric capacitor using Ru electrode

R Cao, B Song, D Shang, Y Yang, Q Luo… - IEEE Electron …, 2019 - ieeexplore.ieee.org
In this letter, the endurance property of Hf 0.5 Zr 0.5 O 2 (HZO) based ferroelectric capacitor
has been improved using Ru electrodes. Compared to the widely used TiN/HZO/TiN …
被引用次数：134 相关文章

[引用][C] Improvement of Endurance in HZO-Based Ferroelectric Capacitor Using Ru Electrode

R Cao, Q Liu, M Liu, B Song, D Shang… - IEEE Electron …, 2019 - ui.adsabs.harvard.edu
Improvement of Endurance in HZO-Based Ferroelectric Capacitor Using Ru Electrode -
NASA/ADS Now on home page ads icon ads Enable full ADS view NASA/ADS Improvement of …

[引用][C] Improvement of Endurance in HZO-Based Ferroelectric Capacitor Using Ru Electrode

R Cao, Q Liu, M Liu, B Song, D Shang, Y Yang… - IEEE Electron Device …, 2019 - cir.nii.ac.jp
Improvement of Endurance in HZO-Based Ferroelectric Capacitor Using Ru Electrode |
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